{"id":640,"date":"2025-07-23T14:47:16","date_gmt":"2025-07-23T06:47:16","guid":{"rendered":"https:\/\/frontbasic.sslab.org.cn\/oxide-semiconductor\/?p=640"},"modified":"2025-07-23T17:18:38","modified_gmt":"2025-07-23T09:18:38","slug":"%e5%9f%ba%e4%ba%8ega2o3-gan%e6%a2%af%e5%ba%a6%e5%bc%82%e8%b4%a8%e7%bb%93%e7%9a%84%e9%ab%98%e6%80%a7%e8%83%bd%e7%b4%ab%e5%a4%96%e5%85%89%e6%8e%a2%e6%b5%8b%e5%99%a8","status":"publish","type":"post","link":"https:\/\/frontbasic.sslab.org.cn\/oxide-semiconductor\/blog\/2025\/07\/23\/%e5%9f%ba%e4%ba%8ega2o3-gan%e6%a2%af%e5%ba%a6%e5%bc%82%e8%b4%a8%e7%bb%93%e7%9a%84%e9%ab%98%e6%80%a7%e8%83%bd%e7%b4%ab%e5%a4%96%e5%85%89%e6%8e%a2%e6%b5%8b%e5%99%a8\/","title":{"rendered":"\u57fa\u4e8e\u6c27\u5316\u9553\/\u6c2e\u5316\u9553\u68af\u5ea6\u5f02\u8d28\u7ed3\u7684\u9ad8\u6027\u80fd\u7d2b\u5916\u5149\u63a2\u6d4b\u5668"},"content":{"rendered":"\n

\u7531\u200c\u677e\u5c71\u6e56\u6750\u6599\u5b9e\u9a8c\u5ba4\u548c\u4e1c\u839e\u7406\u5de5\u5b66\u9662\u7684\u7814\u7a76\u56e2\u961f\u5728\u5b66\u672f\u671f\u520a IEEE Transactions on Electron Devices <\/em>\u53d1\u5e03\u4e86\u4e00\u7bc7\u540d\u4e3a High-Performance Ultraviolet Photodetectors Based on Ga2<\/sub>O3<\/sub>\/GaN Gradient Heterojunction\uff08\u57fa\u4e8e Ga2<\/sub>O3<\/sub>\/GaN \u68af\u5ea6\u5f02\u8d28\u7ed3\u7684\u9ad8\u6027\u80fd\u7d2b\u5916\u5149\u63a2\u6d4b\u5668\uff09\u7684\u6587\u7ae0\u3002<\/p>\n\n\n\n

\u80cc\u666f<\/strong><\/p>\n\n\n\n

GaN \u57fa\u7d2b\u5916\u5149\u7535\u63a2\u6d4b\u5668\u56e0\u8f7d\u6d41\u5b50\u5206\u79bb\u6548\u7387\u4f4e\u3001\u7a7a\u7a74\u8fc1\u79fb\u7387\u8fdc\u4f4e\u4e8e\u7535\u5b50\u8fc1\u79fb\u7387\u4ee5\u53ca\u7f3a\u4e4f\u5185\u5efa\u7535\u573a\uff0c\u5bfc\u81f4\u54cd\u5e94\u7387\u4f4e\u3002\u73b0\u6709\u5f02\u8d28\u7ed3\u7ed3\u6784\u5b58\u5728\u53ef\u89c1\u5149\u54cd\u5e94\u5e72\u6270\u3001\u4f4e\u7d2b\u5916\/\u53ef\u89c1\u6291\u5236\u6bd4\u95ee\u9898\u3002Ga2<\/sub>O3<\/sub>\uff08\u8d85\u5bbd\u7981\u5e26~4.9 eV\uff09\u4e0e GaN \u5f62\u6210\u7684\u5f02\u8d28\u7ed3\u80fd\u5e26\u5339\u914d\uff0c\u53ef\u63d0\u5347\u8f7d\u6d41\u5b50\u5206\u79bb\u6548\u7387\u3002\u4f46\u4f20\u7edf\u70ed\u6c27\u5316\u6cd5\u751f\u6210\u7684 Ga2<\/sub>O3<\/sub>\/GaN \u7a81\u53d8\u5f02\u8d28\u7ed3\u5b58\u5728\u754c\u9762\u52bf\u5792\uff0c\u4e14 Ga2<\/sub>O3<\/sub> \u8584\u819c\u7f3a\u9677\u5bfc\u81f4\u6697\u7535\u6d41\u9ad8\u3001\u63a2\u6d4b\u7387\u4f4e\u3002<\/p>\n\n\n\n

\u4e3b\u8981\u5185\u5bb9<\/strong><\/p>\n\n\n\n

\u6c2e\u5316\u9553\uff08GaN\uff09\u57fa\u7684\u7d2b\u5916\uff08UV\uff09\u5149\u7535\u63a2\u6d4b\u5668\uff08PD\uff09\u7531\u4e8e\u5176\u5728\u7d2b\u5916\u56fa\u5316\u3001\u73af\u5883\u76d1\u6d4b\u7b49\u9886\u57df\u7684\u6f5c\u5728\u5e94\u7528\u800c\u5907\u53d7\u5173\u6ce8\u3002\u7136\u800c\uff0cGaN PD \u901a\u5e38\u7531\u4e8e\u8f7d\u6d41\u5b50\u5206\u79bb\u6548\u7387\u4f4e\u800c\u8868\u73b0\u51fa\u4f4e\u54cd\u5e94\u5ea6\u3002\u7531\u4e8e\u5e26\u9699\u548c\u80fd\u5e26\u5dee\u5f02\u9002\u5b9c\uff0c\u6c27\u5316\u9553\uff08Ga2<\/sub>O3<\/sub>\uff09\/GaN \u5f02\u8d28\u7ed3\u6784\u662f\u5236\u9020\u9ad8\u6027\u80fd UV PD \u7684\u7406\u60f3\u6750\u6599\u3002\u5728\u8fd9\u65b9\u9762\uff0c\u7814\u7a76\u56e2\u961f\u5c55\u793a\u4e86\u5177\u6709\u9ad8\u5149\u54cd\u5e94\u6027\u80fd\u7684 Ga2<\/sub>O3<\/sub>\/GaN \u68af\u5ea6\u5f02\u8d28\u7ed3\u6784 UV PD\u3002Ga2<\/sub>O3<\/sub> \u5c42\u901a\u8fc7\u78c1\u63a7\u6e85\u5c04\u7ed3\u5408\u70ed\u9000\u706b\uff08TA\uff09\u5236\u5907\u3002TA \u4e0d\u4ec5\u63d0\u9ad8\u4e86 Ga2<\/sub>O3<\/sub> \u5c42\u7684\u6676\u4f53\u8d28\u91cf\uff0c\u8fd8\u4fc3\u4f7f\u4e86\u7a81\u53d8\u578b Ga2<\/sub>O3<\/sub>\/GaN \u5f02\u8d28\u7ed3\u5411\u68af\u5ea6\u578b Ga2<\/sub>O3<\/sub>\/GaN \u5f02\u8d28\u7ed3\u7684\u8f6c\u53d8\u3002\u6240\u5236\u5907\u7684 Ga2<\/sub>O3<\/sub>\/GaN \u5f02\u8d28\u7ed3\u6784 UV PD \u5728 254 nm \u548c 365 nm \u6ce2\u957f\u4e0b\u5206\u522b\u8868\u73b0\u51fa 178.9 A\/W \u548c 213.3 A\/W \u7684\u9ad8\u54cd\u5e94\u5ea6\uff0c\u5bf9\u5e94\u7684\u63a2\u6d4b\u7387\u4e3a 3.0 \u00d7 1015<\/sup> \u548c 3.6 \u00d7 1015<\/sup> Jones\u3002\u8fd9\u9879\u5de5\u4f5c\u4e3a\u5f00\u53d1\u4ece UV-A \u5230 UV-C \u6ce2\u6bb5\u7684\u9ad8\u54cd\u5e94\u5ea6 UV PD \u63d0\u4f9b\u4e86\u4e00\u6761\u6709\u524d\u666f\u7684\u9014\u5f84\u3002<\/p>\n\n\n\n

\u521b\u65b0\u70b9<\/strong><\/p>\n\n\n\n

\u25cf \u901a\u8fc7 TA \u8bf1\u5bfc\u754c\u9762\u5143\u7d20\u6269\u6563\uff0c\u5f62\u6210\u6e10\u53d8\u80fd\u5e26\u7ed3\u6784\uff0c\u6d88\u9664\u7a81\u53d8\u5f02\u8d28\u7ed3\u7684\u5bfc\u5e26\u52bf\u5792\u5cf0\uff0c\u63d0\u5347\u7535\u5b50\u4f20\u8f93\u6548\u7387\u3002<\/p>\n\n\n\n

\u25cf TA \u5c06\u975e\u6676 Ga2<\/sub>O3<\/sub> \u8f6c\u5316\u4e3a\u591a\u6676\uff0c\u51cf\u5c11\u7f3a\u9677\u8c03\u5236\u7684\u8f7d\u6d41\u5b50\u6355\u83b7\u8fc7\u7a0b\uff0c\u964d\u4f4e\u6697\u7535\u6d41\u3002<\/p>\n\n\n\n

\u25cf \u5185\u5efa\u7535\u573a\uff08\u5782\u76f4\u5206\u79bb\uff09\u4e0e\u5916\u504f\u538b\uff08\u6a2a\u5411\u6f02\u79fb\uff09\u534f\u540c\u4f5c\u7528\uff0c\u5b9e\u73b0\u4e8c\u7ef4\u8f7d\u6d41\u5b50\u9ad8\u6548\u5206\u79bb\u3002<\/p>\n\n\n\n

\u603b\u7ed3<\/strong><\/p>\n\n\n\n

\u901a\u8fc7\u5c06\u78c1\u63a7\u6e85\u5c04\u751f\u957f\u7684 Ga2<\/sub>O3<\/sub> \u4e0e\u9000\u706b\u5904\u7406\u76f8\u7ed3\u5408\uff0c\u53ef\u4ee5\u5b9e\u73b0\u5177\u6709\u9ad8\u54cd\u5e94\u5ea6\u548c\u63a2\u6d4b\u7387\u7684 Ga2<\/sub>O3<\/sub>\/GaN \u5f02\u8d28\u7ed3\u7d2b\u5916\u5149\u7535\u63a2\u6d4b\u5668\u3002\u5728 5 V \u7684\u504f\u7f6e\u7535\u538b\u4e0b\uff0c\u975e\u6676 Ga2<\/sub>O3<\/sub>\/GaN \u5f02\u8d28\u7ed3\uff08\u6837\u54c1A\uff09\u5728 254 nm\uff08140 \u00b5W\/cm2<\/sup>\uff09\u65f6\u7684\u54cd\u5e94\u5ea6\u4e3a 6.7 A\/W\uff0c\u5728 365 nm\uff0850 \u00b5W\/cm2<\/sup>\uff09\u65f6\u4e3a 18.7 A\/W\uff0c\u63a2\u6d4b\u7387\u5206\u522b\u4e3a 3.5\u00d71013<\/sup> Jones\uff08254 nm\uff09\u548c 9.6 \u00d7 1013<\/sup> Jones\uff08365 nm\uff09\u3002\u901a\u8fc7\u9ad8\u6e29\u9000\u706b\u5904\u7406\uff0c\u8be5 Ga2<\/sub>O3<\/sub> \u5c42\u4ece\u975e\u6676\u6001\u8f6c\u53d8\u4e3a\u591a\u6676\u6001\uff0c\u663e\u8457\u63d0\u9ad8\u4e86\u6676\u4f53\u8d28\u91cf\uff1b\u53e6\u4e00\u65b9\u9762\uff0c\u901a\u8fc7\u754c\u9762\u5904\u6c2e\u548c\u6c27\u5143\u7d20\u7684\u70ed\u6269\u6563\uff0c\u53ef\u4ee5\u5f62\u6210\u68af\u5ea6 Ga2<\/sub>O3<\/sub>\/GaN \u5f02\u8d28\u7ed3\uff08\u6837\u54c1B\uff09\uff0c\u4ece\u800c\u6709\u6548\u63d0\u9ad8\u4e86\u5149\u751f\u8f7d\u6d41\u5b50\u7684\u5206\u79bb\u6548\u7387\u3002\u57fa\u4e8e\u4e0a\u8ff0\u539f\u56e0\uff0c\u5728 5 V \u7684\u504f\u7f6e\u7535\u538b\u4e0b\uff0c\u5668\u4ef6\u7684\u54cd\u5e94\u5ea6\u548c\u63a2\u6d4b\u7387\u5747\u6bd4 \u9000\u706b\u524d\u9ad8\u4e00\u4e2a\u6570\u91cf\u7ea7\uff1a\u5176\u54cd\u5e94\u5ea6\u5206\u522b\u4e3a 178.9 A\/W \uff08365 nm\uff09\u548c 213.3 A\/W\uff08254 nm\uff09\uff0c\u63a2\u6d4b\u7387\u5206\u522b\u4e3a 3.0 \u00d7 1015<\/sup> Jones\uff08365 nm\uff09\u548c 3.6 \u00d7 1015<\/sup> Jones\uff08254 nm\uff09\u3002\u53e6\u5916\uff0c\u4e0a\u8ff0\u4e24\u7c7b Ga2<\/sub>O3<\/sub>\/GaN \u5f02\u8d28\u7ed3\u63a2\u6d4b\u5668\u5bf9\u7d2b\u5916\u7ebf\u8f90\u5c04\u7684\u5149\u54cd\u5e94\u5747\u9ad8\u4e8e\u7eaf GaN \u63a2\u6d4b\u5668\uff08\u6837\u54c1C\uff09\uff0c\u8fd9\u8fdb\u4e00\u6b65\u8bc1\u5b9e\u4e86 Ga2<\/sub>O3<\/sub>\/GaN \u5f02\u8d28\u7ed3\u5728\u63d0\u9ad8\u5149\u751f\u8f7d\u6d41\u5b50\u5206\u79bb\u6548\u7387\u548c\u5149\u7535\u63a2\u6d4b\u6027\u80fd\u65b9\u9762\u7684\u91cd\u8981\u4f5c\u7528\u3002<\/p>\n\n\n

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\u6587\u7ae0\u94fe\u63a5DOI<\/strong>\uff1ado.org\/10.1109\/TED\/2025.3582232<\/a><\/p>\n\n\n\n

\u9605\u8bfb\u539f\u6587<\/strong>\uff1ahttps:\/\/mp.weixin.qq.com\/s\/adRmdOFbXf9-QlYc1wafOA<\/a> \u6765\u81ea\u4e9a\u6d32\u6c27\u5316\u9553\u8054\u76df\u516c\u4f17\u53f7<\/p>\n","protected":false},"excerpt":{"rendered":"

\u7531\u200c\u677e\u5c71\u6e56\u6750\u6599\u5b9e\u9a8c\u5ba4\u548c\u4e1c\u839e\u7406\u5de5\u5b66\u9662\u7684\u7814\u7a76\u56e2\u961f\u5728\u5b66\u672f\u671f\u520a IEEE Transactions on E […]<\/p>\n","protected":false},"author":12,"featured_media":645,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[1,4],"tags":[],"acf":[],"_links":{"self":[{"href":"https:\/\/frontbasic.sslab.org.cn\/oxide-semiconductor\/wp-json\/wp\/v2\/posts\/640"}],"collection":[{"href":"https:\/\/frontbasic.sslab.org.cn\/oxide-semiconductor\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/frontbasic.sslab.org.cn\/oxide-semiconductor\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/frontbasic.sslab.org.cn\/oxide-semiconductor\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/frontbasic.sslab.org.cn\/oxide-semiconductor\/wp-json\/wp\/v2\/comments?post=640"}],"version-history":[{"count":8,"href":"https:\/\/frontbasic.sslab.org.cn\/oxide-semiconductor\/wp-json\/wp\/v2\/posts\/640\/revisions"}],"predecessor-version":[{"id":668,"href":"https:\/\/frontbasic.sslab.org.cn\/oxide-semiconductor\/wp-json\/wp\/v2\/posts\/640\/revisions\/668"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/frontbasic.sslab.org.cn\/oxide-semiconductor\/wp-json\/wp\/v2\/media\/645"}],"wp:attachment":[{"href":"https:\/\/frontbasic.sslab.org.cn\/oxide-semiconductor\/wp-json\/wp\/v2\/media?parent=640"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/frontbasic.sslab.org.cn\/oxide-semiconductor\/wp-json\/wp\/v2\/categories?post=640"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/frontbasic.sslab.org.cn\/oxide-semiconductor\/wp-json\/wp\/v2\/tags?post=640"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}